Optical, electrical and electromechanical analysis instrumentation (MEMS)
Description
- Optical/electrical inspection/analysis of devices or wafers: metallographic optical microscope stereo-microscope probe station with micropositioners and optical microscope semiconductor parameter analyzer (Agilent B1500A)
- Generation/conditioning/measurement of electrical signals: oscilloscopes Tektronix (dpo304, 2024, TDS520B, 784D) spectrum analyzer HP4195A waveform generator up to 80 MHz (Agilent, Rigol DG4102) analog/digital generation/acquisition boards programmable electrometer (Keithley 617) lock-in amplifier 100 kHz (SR830DSP) universal counter (Agilent 53131A)
- Generation of reference physical quantities for sensors calibration/characterization: rate table (angular rates, accelerations, +-3000 dps, 400 Hz) 3-axis magnetic field generator (+-7 mT, 200 Hz), vibratory shaker (40 kHz, 10 g), ultrasound transducers ultra-high-vacuum pump with vacuum chamber integrating sphere with high output window uniformity, equipped with reference color/resolution charts
- Custom instrumentation: electromechanical characterization of MEMS/NEMS devices (ITmems MCP-G)
