Lab4MEMS
Responsible:
EU Research FP7
DEIB Role: Partner
Start date: 2013-01-01
Length: 24 months
Project abstract
Lab4MEMS is a R&D project funded by the European Community under the ENIAC Nanoelectronics Framework aiming to establish a European Pilot Line for key enabling technologies on advanced piezoelectric and magnetic materials, including advanced 3D Packaging technologies to meet the ever evolving market needs.
The Pilot Line is promoted to reinforce the manufacturing facilities currently located in each respective participating country, aiming to implement and optimize the industrial processes and to validate the supply chains and the demonstrators suitable to penetrate the market. The main industrial Pilot Line is located in STMicroelectronics among Italy and Malta, well supported by R&D Centres, SMEs and Research Labs distributed among the 9 european countries of the consortia, streaming the whole manufacturing chain from front-end to back-end. The project started in January 2013 and continued for 36 months.
During the last decade, diversification technologies unleashed major killer apps of today’s consumer, health care and industrial market. Innovations like MEMS motion sensors, portable healthcare devices and robotics, created leading well recognized centres of excellence in Europe. The ENIAC JU Lab4MEMS project strenghtens such competences via the establishment of a distributed pilot line able to catalize industrial and academic resources toward the development of innovative technologies and products.
The Pilot Line is promoted to reinforce the manufacturing facilities currently located in each respective participating country, aiming to implement and optimize the industrial processes and to validate the supply chains and the demonstrators suitable to penetrate the market. The main industrial Pilot Line is located in STMicroelectronics among Italy and Malta, well supported by R&D Centres, SMEs and Research Labs distributed among the 9 european countries of the consortia, streaming the whole manufacturing chain from front-end to back-end. The project started in January 2013 and continued for 36 months.
During the last decade, diversification technologies unleashed major killer apps of today’s consumer, health care and industrial market. Innovations like MEMS motion sensors, portable healthcare devices and robotics, created leading well recognized centres of excellence in Europe. The ENIAC JU Lab4MEMS project strenghtens such competences via the establishment of a distributed pilot line able to catalize industrial and academic resources toward the development of innovative technologies and products.
Project results
Scientific publications:
- “Thermo-mechanical Reliability of Gold Stud Bump Bonding for Large Volume MEMS Devices”, The 65th Electronic Components and Technology Conference (ECTC), M.M.V Taklo et al, May 26 – 29, 2015 San Diego, California.
- “Optimization of Sensing Stators in Capacitive MEMS Operating at Resonance”, IUNET, A. Frangi, G. Laghi, G. Langfelder, P. Minotti, S. Zerbini – Journal of Microelectromechanical Systems, in press, DOI: 10.1109/JMEMS.2014.2381515.
- “A Low-Noise Sub-500-uW Lorentz Force Based Integrated Magnetic Field Sensing System”, IUNET, S. Brenna, P. Minotti, A. Bonfanti, G. Laghi, G. Langfelder, A. Longoni, A. L. Lacaita – IEEE MEMS 2015, Lisbona, January 2015.
- “Torsional MEMS magnetometer operated off-resonance for in-plane magnetic field detection”, IUNET, G. Laghi, S. Dellea, A. Longoni, P. Minotti, A. Tocchio, S. Zerbini, G. Langfelder, Sensors and Actuators A 229 (2015) 218–226.
- “Evaluation of the piezoelectric properties and voltage generation of flexible zinc oxide thin films”, Center for Space Human Robotics, Istituto Italiano di Tecnologia (IIT), M. Laurenti, et al., Nanotechnology 26 (2015).
